SEMI Standardization Efforts in Compound Semiconductors

James D. Oliver* and Russ Kremer+

Co-chair

SEMI North American Standards Committee on

Compound Semiconductor Materials

*Northrop Grumman Electronic Systems

M/S 3K13, PO Box 1521

Baltimore MD 21203

j.oliver@ngc.com 410-765-0117

+ Freiberger Compound Materials USA

7071 Corporate Way,

Dayton, OH 45459-8911

russ@fcm-us.com 937-291-2899

Key Words: SEMI International, Compound Semiconductor Standards, GaAs, SiC, InP, wafer specifications

Abstract

The history and purpose of the SEMI Standards organization is presented with emphasis on the applications to the Compound Semiconductor Industry. A description of the processes used to develop a SEMI Standard, the consensus balloting procedure, and formal Standards publication is explained. Current standards development activities in the Compound Semiconductor Committee including work on GaAs, InP, SiC, electrical properties and proposed task forces are reviewed.

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