SEMI Standardization Efforts in Compound Semiconductors

 

James D. Oliver* and Russ Kremer+

Co-chair

SEMI North American Standards Committee on

Compound Semiconductor Materials

 


*Northrop Grumman Electronic Systems

M/S 3K13, PO Box 1521

Baltimore MD 21203

j.oliver@ngc.com 410-765-0117

 

+ Freiberger Compound Materials USA

7071 Corporate Way,

Dayton, OH 45459-8911

russ@fcm-us.com  937-291-2899


 

Key Words:  SEMI International, Compound Semiconductor Standards, GaAs, SiC, InP, wafer specifications

 


Abstract

 

The history and purpose of the SEMI Standards organization is presented with emphasis on the applications to the Compound Semiconductor Industry. A description of the processes used to develop a SEMI Standard, the consensus balloting procedure, and formal  Standards publication is explained.  Current standards development activities in the Compound Semiconductor Committee including work on GaAs, InP, SiC, electrical properties and proposed task forces are reviewed.

 

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