Advanced
Commercial InP HBT IC Process
N. X. Nguyen, J.
Fierro, K. T. Feng, and C. Nguyen
Global Communication
Semiconductors, Inc.
Email:
nnguyen@gcsincorp.com; Phone: 310-530-7274 x166
Keywords: commercial foundry,
InP HBT, reliability, manufacturability
Abstract
An advanced,
high-performance 4-inch InP HBT process technology has been offered for
commercial pure-play foundry services by GCS for the last two years. In this
paper, we reported on recent advances of our proprietary device design and
process technology, GCS’s InP HBTs show potentially excellent reliability under
lifetests at current densities of 100kA/cm 2 and higher. State-of –the-art
circuit performances have been demonstrated by our customers designing into our
baseline InP HBT process technology; which we believed are strong evidences of
the readiness of InP HBT technology for mainstream IC production.